8/26/2010	3:01:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	3:01:14 PM	Recipe started at 3:01 PM
8/26/2010	3:01:14 PM	H2 valve closed
8/26/2010	3:01:14 PM	BCl3 valve closed
8/26/2010	3:01:14 PM	PH3 valve closed
8/26/2010	3:01:14 PM	SiCl4 pre valve closed
8/26/2010	3:01:14 PM	SiCl4 post valve closed
8/26/2010	3:01:14 PM	Main Vac valve closed
8/26/2010	3:01:14 PM	Bypass valve closed
8/26/2010	3:01:14 PM	Bubbler valve closed
8/26/2010	3:01:14 PM	Helium valve opened
8/26/2010	3:01:14 PM	Helium MFC set to  500.000000
8/26/2010	3:01:14 PM	H2 MFC set to  0.000000
8/26/2010	3:01:14 PM	BCl3 MFC set to  0.000000
8/26/2010	3:01:14 PM	PHl3 MFC set to  0.000000
8/26/2010	3:01:14 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:01:14 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:01:14 PM	Tube furnace set to 0
8/26/2010	3:02:34 PM	Helium valve closed
8/26/2010	3:02:34 PM	H2 valve closed
8/26/2010	3:02:34 PM	BCl3 valve closed
8/26/2010	3:02:34 PM	PH3 valve closed
8/26/2010	3:02:34 PM	SiCl4 pre valve closed
8/26/2010	3:02:34 PM	SiCl4 post valve closed
8/26/2010	3:02:34 PM	Main Vac valve closed
8/26/2010	3:02:34 PM	Bypass valve closed
8/26/2010	3:02:34 PM	Bubbler valve closed
8/26/2010	3:02:34 PM	Helium MFC set to  0.000000
8/26/2010	3:02:34 PM	H2 MFC set to  0.000000
8/26/2010	3:02:34 PM	BCl3 MFC set to  0.000000
8/26/2010	3:02:34 PM	PHl3 MFC set to  0.000000
8/26/2010	3:02:34 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:02:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:02:35 PM	Tube furnace set to 0
8/26/2010	3:02:35 PM	Run finished at 3:02 PM
8/26/2010	3:02:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	3:10:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	3:10:21 PM	Recipe started at 3:10 PM
8/26/2010	3:10:21 PM	Helium valve closed
8/26/2010	3:10:21 PM	H2 valve closed
8/26/2010	3:10:21 PM	BCl3 valve closed
8/26/2010	3:10:21 PM	PH3 valve closed
8/26/2010	3:10:21 PM	SiCl4 pre valve closed
8/26/2010	3:10:21 PM	SiCl4 post valve closed
8/26/2010	3:10:21 PM	Main Vac valve closed
8/26/2010	3:10:21 PM	Bubbler valve closed
8/26/2010	3:10:21 PM	Bypass valve opened
8/26/2010	3:10:21 PM	Helium MFC set to  0.000000
8/26/2010	3:10:21 PM	H2 MFC set to  0.000000
8/26/2010	3:10:21 PM	BCl3 MFC set to  0.000000
8/26/2010	3:10:21 PM	PHl3 MFC set to  0.000000
8/26/2010	3:10:21 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:10:21 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:10:21 PM	Tube furnace set to 0
8/26/2010	3:11:00 PM	Helium valve closed
8/26/2010	3:11:00 PM	H2 valve closed
8/26/2010	3:11:00 PM	BCl3 valve closed
8/26/2010	3:11:00 PM	PH3 valve closed
8/26/2010	3:11:00 PM	SiCl4 pre valve closed
8/26/2010	3:11:00 PM	SiCl4 post valve closed
8/26/2010	3:11:00 PM	Bubbler valve closed
8/26/2010	3:11:00 PM	Main Vac valve opened
8/26/2010	3:11:00 PM	Bypass valve opened
8/26/2010	3:11:00 PM	Helium MFC set to  0.000000
8/26/2010	3:11:00 PM	H2 MFC set to  0.000000
8/26/2010	3:11:00 PM	BCl3 MFC set to  0.000000
8/26/2010	3:11:00 PM	PHl3 MFC set to  0.000000
8/26/2010	3:11:00 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:11:00 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:11:00 PM	Tube furnace set to 0
8/26/2010	3:11:01 PM	Run finished at 3:11 PM
8/26/2010	3:11:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	3:14:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/26/2010	3:14:12 PM	Recipe started at 3:14 PM
8/26/2010	3:14:12 PM	H2 valve closed
8/26/2010	3:14:12 PM	BCl3 valve closed
8/26/2010	3:14:12 PM	PH3 valve closed
8/26/2010	3:14:12 PM	SiCl4 pre valve closed
8/26/2010	3:14:12 PM	SiCl4 post valve closed
8/26/2010	3:14:12 PM	Main Vac valve closed
8/26/2010	3:14:12 PM	Bypass valve closed
8/26/2010	3:14:12 PM	Bubbler valve closed
8/26/2010	3:14:12 PM	Helium valve opened
8/26/2010	3:14:12 PM	Helium MFC set to  500.000000
8/26/2010	3:14:12 PM	H2 MFC set to  0.000000
8/26/2010	3:14:12 PM	BCl3 MFC set to  0.000000
8/26/2010	3:14:12 PM	PHl3 MFC set to  0.000000
8/26/2010	3:14:12 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:14:12 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:14:12 PM	Tube furnace set to 0
8/26/2010	3:15:34 PM	Helium valve closed
8/26/2010	3:15:34 PM	H2 valve closed
8/26/2010	3:15:34 PM	BCl3 valve closed
8/26/2010	3:15:34 PM	PH3 valve closed
8/26/2010	3:15:34 PM	SiCl4 pre valve closed
8/26/2010	3:15:34 PM	SiCl4 post valve closed
8/26/2010	3:15:34 PM	Main Vac valve closed
8/26/2010	3:15:34 PM	Bypass valve closed
8/26/2010	3:15:34 PM	Bubbler valve closed
8/26/2010	3:15:34 PM	Helium MFC set to  0.000000
8/26/2010	3:15:34 PM	H2 MFC set to  0.000000
8/26/2010	3:15:34 PM	BCl3 MFC set to  0.000000
8/26/2010	3:15:34 PM	PHl3 MFC set to  0.000000
8/26/2010	3:15:34 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:15:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:15:34 PM	Tube furnace set to 0
8/26/2010	3:15:49 PM	Helium valve closed
8/26/2010	3:15:49 PM	H2 valve closed
8/26/2010	3:15:49 PM	BCl3 valve closed
8/26/2010	3:15:49 PM	PH3 valve closed
8/26/2010	3:15:49 PM	SiCl4 pre valve closed
8/26/2010	3:15:49 PM	SiCl4 post valve closed
8/26/2010	3:15:49 PM	Main Vac valve closed
8/26/2010	3:15:49 PM	Bubbler valve closed
8/26/2010	3:15:49 PM	Bypass valve opened
8/26/2010	3:15:49 PM	Helium MFC set to  0.000000
8/26/2010	3:15:49 PM	H2 MFC set to  0.000000
8/26/2010	3:15:49 PM	BCl3 MFC set to  0.000000
8/26/2010	3:15:49 PM	PHl3 MFC set to  0.000000
8/26/2010	3:15:49 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:15:49 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:15:49 PM	Tube furnace set to 0
8/26/2010	3:16:18 PM	Helium valve closed
8/26/2010	3:16:18 PM	H2 valve closed
8/26/2010	3:16:18 PM	BCl3 valve closed
8/26/2010	3:16:18 PM	PH3 valve closed
8/26/2010	3:16:18 PM	SiCl4 pre valve closed
8/26/2010	3:16:18 PM	SiCl4 post valve closed
8/26/2010	3:16:18 PM	Bubbler valve closed
8/26/2010	3:16:18 PM	Main Vac valve opened
8/26/2010	3:16:18 PM	Bypass valve opened
8/26/2010	3:16:18 PM	Helium MFC set to  0.000000
8/26/2010	3:16:18 PM	H2 MFC set to  0.000000
8/26/2010	3:16:18 PM	BCl3 MFC set to  0.000000
8/26/2010	3:16:18 PM	PHl3 MFC set to  0.000000
8/26/2010	3:16:18 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:16:18 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:16:18 PM	Tube furnace set to 0
8/26/2010	3:20:21 PM	H2 valve closed
8/26/2010	3:20:21 PM	BCl3 valve closed
8/26/2010	3:20:21 PM	PH3 valve closed
8/26/2010	3:20:21 PM	SiCl4 pre valve closed
8/26/2010	3:20:21 PM	SiCl4 post valve closed
8/26/2010	3:20:21 PM	Main Vac valve closed
8/26/2010	3:20:21 PM	Bypass valve closed
8/26/2010	3:20:21 PM	Bubbler valve closed
8/26/2010	3:20:21 PM	Helium valve opened
8/26/2010	3:20:21 PM	Helium MFC set to  500.000000
8/26/2010	3:20:21 PM	H2 MFC set to  0.000000
8/26/2010	3:20:21 PM	BCl3 MFC set to  0.000000
8/26/2010	3:20:21 PM	PHl3 MFC set to  0.000000
8/26/2010	3:20:21 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:20:21 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:20:21 PM	Tube furnace set to 0
8/26/2010	3:21:42 PM	Helium valve closed
8/26/2010	3:21:42 PM	H2 valve closed
8/26/2010	3:21:42 PM	BCl3 valve closed
8/26/2010	3:21:42 PM	PH3 valve closed
8/26/2010	3:21:42 PM	SiCl4 pre valve closed
8/26/2010	3:21:42 PM	SiCl4 post valve closed
8/26/2010	3:21:42 PM	Main Vac valve closed
8/26/2010	3:21:42 PM	Bypass valve closed
8/26/2010	3:21:42 PM	Bubbler valve closed
8/26/2010	3:21:42 PM	Helium MFC set to  0.000000
8/26/2010	3:21:42 PM	H2 MFC set to  0.000000
8/26/2010	3:21:42 PM	BCl3 MFC set to  0.000000
8/26/2010	3:21:42 PM	PHl3 MFC set to  0.000000
8/26/2010	3:21:42 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:21:42 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:21:42 PM	Tube furnace set to 0
8/26/2010	3:21:57 PM	Helium valve closed
8/26/2010	3:21:57 PM	H2 valve closed
8/26/2010	3:21:57 PM	BCl3 valve closed
8/26/2010	3:21:57 PM	PH3 valve closed
8/26/2010	3:21:57 PM	SiCl4 pre valve closed
8/26/2010	3:21:57 PM	SiCl4 post valve closed
8/26/2010	3:21:57 PM	Main Vac valve closed
8/26/2010	3:21:57 PM	Bubbler valve closed
8/26/2010	3:21:57 PM	Bypass valve opened
8/26/2010	3:21:57 PM	Helium MFC set to  0.000000
8/26/2010	3:21:57 PM	H2 MFC set to  0.000000
8/26/2010	3:21:57 PM	BCl3 MFC set to  0.000000
8/26/2010	3:21:57 PM	PHl3 MFC set to  0.000000
8/26/2010	3:21:57 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:21:57 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:21:57 PM	Tube furnace set to 0
8/26/2010	3:22:29 PM	Helium valve closed
8/26/2010	3:22:29 PM	H2 valve closed
8/26/2010	3:22:29 PM	BCl3 valve closed
8/26/2010	3:22:29 PM	PH3 valve closed
8/26/2010	3:22:29 PM	SiCl4 pre valve closed
8/26/2010	3:22:29 PM	SiCl4 post valve closed
8/26/2010	3:22:29 PM	Bubbler valve closed
8/26/2010	3:22:29 PM	Main Vac valve opened
8/26/2010	3:22:29 PM	Bypass valve opened
8/26/2010	3:22:29 PM	Helium MFC set to  0.000000
8/26/2010	3:22:29 PM	H2 MFC set to  0.000000
8/26/2010	3:22:29 PM	BCl3 MFC set to  0.000000
8/26/2010	3:22:29 PM	PHl3 MFC set to  0.000000
8/26/2010	3:22:29 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:22:29 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:22:29 PM	Tube furnace set to 0
8/26/2010	3:23:50 PM	H2 valve closed
8/26/2010	3:23:50 PM	BCl3 valve closed
8/26/2010	3:23:50 PM	PH3 valve closed
8/26/2010	3:23:50 PM	SiCl4 pre valve closed
8/26/2010	3:23:50 PM	SiCl4 post valve closed
8/26/2010	3:23:50 PM	Main Vac valve closed
8/26/2010	3:23:50 PM	Bypass valve closed
8/26/2010	3:23:50 PM	Bubbler valve closed
8/26/2010	3:23:50 PM	Helium valve opened
8/26/2010	3:23:51 PM	Helium MFC set to  500.000000
8/26/2010	3:23:51 PM	H2 MFC set to  0.000000
8/26/2010	3:23:51 PM	BCl3 MFC set to  0.000000
8/26/2010	3:23:51 PM	PHl3 MFC set to  0.000000
8/26/2010	3:23:51 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:23:51 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:23:51 PM	Tube furnace set to 0
8/26/2010	3:23:53 PM	Helium valve closed
8/26/2010	3:23:53 PM	H2 valve closed
8/26/2010	3:23:53 PM	BCl3 valve closed
8/26/2010	3:23:53 PM	PH3 valve closed
8/26/2010	3:23:53 PM	SiCl4 pre valve closed
8/26/2010	3:23:53 PM	SiCl4 post valve closed
8/26/2010	3:23:53 PM	Main Vac valve closed
8/26/2010	3:23:53 PM	Bypass valve closed
8/26/2010	3:23:53 PM	Bubbler valve closed
8/26/2010	3:23:53 PM	Helium MFC set to  0.000000
8/26/2010	3:23:53 PM	H2 MFC set to  0.000000
8/26/2010	3:23:53 PM	BCl3 MFC set to  0.000000
8/26/2010	3:23:53 PM	PHl3 MFC set to  0.000000
8/26/2010	3:23:53 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:23:53 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:23:53 PM	Tube furnace set to 0
8/26/2010	3:23:54 PM	Helium valve closed
8/26/2010	3:23:54 PM	H2 valve closed
8/26/2010	3:23:54 PM	BCl3 valve closed
8/26/2010	3:23:54 PM	PH3 valve closed
8/26/2010	3:23:54 PM	SiCl4 pre valve closed
8/26/2010	3:23:54 PM	SiCl4 post valve closed
8/26/2010	3:23:54 PM	Main Vac valve closed
8/26/2010	3:23:54 PM	Bubbler valve closed
8/26/2010	3:23:54 PM	Bypass valve opened
8/26/2010	3:23:54 PM	Helium MFC set to  0.000000
8/26/2010	3:23:54 PM	H2 MFC set to  0.000000
8/26/2010	3:23:54 PM	BCl3 MFC set to  0.000000
8/26/2010	3:23:54 PM	PHl3 MFC set to  0.000000
8/26/2010	3:23:54 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:23:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:23:54 PM	Tube furnace set to 0
8/26/2010	3:23:54 PM	Helium valve closed
8/26/2010	3:23:54 PM	H2 valve closed
8/26/2010	3:23:54 PM	BCl3 valve closed
8/26/2010	3:23:54 PM	PH3 valve closed
8/26/2010	3:23:54 PM	SiCl4 pre valve closed
8/26/2010	3:23:54 PM	SiCl4 post valve closed
8/26/2010	3:23:54 PM	Bubbler valve closed
8/26/2010	3:23:54 PM	Main Vac valve opened
8/26/2010	3:23:54 PM	Bypass valve opened
8/26/2010	3:23:54 PM	Helium MFC set to  0.000000
8/26/2010	3:23:54 PM	H2 MFC set to  0.000000
8/26/2010	3:23:54 PM	BCl3 MFC set to  0.000000
8/26/2010	3:23:54 PM	PHl3 MFC set to  0.000000
8/26/2010	3:23:54 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:23:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:23:54 PM	Tube furnace set to 0
8/26/2010	3:23:55 PM	Helium valve closed
8/26/2010	3:23:55 PM	H2 valve closed
8/26/2010	3:23:55 PM	BCl3 valve closed
8/26/2010	3:23:55 PM	PH3 valve closed
8/26/2010	3:23:55 PM	SiCl4 pre valve closed
8/26/2010	3:23:55 PM	SiCl4 post valve closed
8/26/2010	3:23:55 PM	Bubbler valve closed
8/26/2010	3:23:55 PM	Main Vac valve opened
8/26/2010	3:23:55 PM	Bypass valve opened
8/26/2010	3:23:55 PM	Helium MFC set to  0.000000
8/26/2010	3:23:55 PM	H2 MFC set to  0.000000
8/26/2010	3:23:55 PM	BCl3 MFC set to  0.000000
8/26/2010	3:23:55 PM	PHl3 MFC set to  0.000000
8/26/2010	3:23:55 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:23:55 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:23:55 PM	Tube furnace set to 0
8/26/2010	3:23:55 PM	Run finished at 3:23 PM
8/26/2010	3:23:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/26/2010	3:24:30 PM	Recipe started at 3:24 PM
8/26/2010	3:24:30 PM	BCl3 valve closed
8/26/2010	3:24:30 PM	PH3 valve closed
8/26/2010	3:24:30 PM	SiCl4 pre valve closed
8/26/2010	3:24:30 PM	SiCl4 post valve closed
8/26/2010	3:24:30 PM	Main Vac valve closed
8/26/2010	3:24:30 PM	Bypass valve closed
8/26/2010	3:24:30 PM	Bubbler valve closed
8/26/2010	3:24:30 PM	Helium valve opened
8/26/2010	3:24:30 PM	H2 valve opened
8/26/2010	3:24:30 PM	Helium MFC set to  500.000000
8/26/2010	3:24:30 PM	H2 MFC set to  15.000000
8/26/2010	3:24:30 PM	BCl3 MFC set to  0.000000
8/26/2010	3:24:30 PM	PHl3 MFC set to  0.000000
8/26/2010	3:24:30 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:24:30 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:24:31 PM	Tube furnace set to 0
8/26/2010	3:25:50 PM	BCl3 valve closed
8/26/2010	3:25:50 PM	PH3 valve closed
8/26/2010	3:25:50 PM	SiCl4 pre valve closed
8/26/2010	3:25:50 PM	SiCl4 post valve closed
8/26/2010	3:25:50 PM	Main Vac valve closed
8/26/2010	3:25:50 PM	Bypass valve closed
8/26/2010	3:25:50 PM	Helium valve opened
8/26/2010	3:25:50 PM	H2 valve opened
8/26/2010	3:25:50 PM	Bubbler valve opened
8/26/2010	3:25:50 PM	Helium MFC set to  500.000000
8/26/2010	3:25:50 PM	H2 MFC set to  15.000000
8/26/2010	3:25:50 PM	BCl3 MFC set to  0.000000
8/26/2010	3:25:50 PM	PHl3 MFC set to  0.000000
8/26/2010	3:25:50 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:25:50 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:25:50 PM	Tube furnace set to 450
8/26/2010	3:26:01 PM	Run aborted at 3:26 PM
8/26/2010	3:26:01 PM	Helium valve closed
8/26/2010	3:26:01 PM	H2 valve closed
8/26/2010	3:26:01 PM	BCl3 valve closed
8/26/2010	3:26:01 PM	PH3 valve closed
8/26/2010	3:26:01 PM	SiCl4 pre valve closed
8/26/2010	3:26:01 PM	SiCl4 post valve closed
8/26/2010	3:26:01 PM	Bypass valve closed
8/26/2010	3:26:01 PM	Main Vac valve closed
8/26/2010	3:26:01 PM	Bubbler valve closed
8/26/2010	3:26:01 PM	Helium MFC set to  0.000000
8/26/2010	3:26:01 PM	H2 MFC set to  0.000000
8/26/2010	3:26:01 PM	BCl3 MFC set to  0.000000
8/26/2010	3:26:01 PM	PHl3 MFC set to  0.000000
8/26/2010	3:26:01 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:26:02 PM	Tube furnace set to 0
8/26/2010	3:27:05 PM	Recipe started at 3:27 PM
8/26/2010	3:27:05 PM	BCl3 valve closed
8/26/2010	3:27:05 PM	PH3 valve closed
8/26/2010	3:27:05 PM	SiCl4 pre valve closed
8/26/2010	3:27:05 PM	SiCl4 post valve closed
8/26/2010	3:27:05 PM	Main Vac valve closed
8/26/2010	3:27:05 PM	Bypass valve closed
8/26/2010	3:27:05 PM	Bubbler valve closed
8/26/2010	3:27:05 PM	Helium valve opened
8/26/2010	3:27:05 PM	H2 valve opened
8/26/2010	3:27:05 PM	Helium MFC set to  500.000000
8/26/2010	3:27:05 PM	H2 MFC set to  15.000000
8/26/2010	3:27:05 PM	BCl3 MFC set to  0.000000
8/26/2010	3:27:05 PM	PHl3 MFC set to  0.000000
8/26/2010	3:27:05 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:27:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:27:05 PM	Tube furnace set to 0
8/26/2010	3:27:08 PM	BCl3 valve closed
8/26/2010	3:27:08 PM	PH3 valve closed
8/26/2010	3:27:08 PM	SiCl4 pre valve closed
8/26/2010	3:27:08 PM	SiCl4 post valve closed
8/26/2010	3:27:08 PM	Main Vac valve closed
8/26/2010	3:27:08 PM	Bypass valve closed
8/26/2010	3:27:08 PM	Helium valve opened
8/26/2010	3:27:08 PM	H2 valve opened
8/26/2010	3:27:08 PM	Bubbler valve opened
8/26/2010	3:27:08 PM	Helium MFC set to  500.000000
8/26/2010	3:27:08 PM	H2 MFC set to  15.000000
8/26/2010	3:27:08 PM	BCl3 MFC set to  0.000000
8/26/2010	3:27:08 PM	PHl3 MFC set to  0.000000
8/26/2010	3:27:08 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:27:08 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:27:09 PM	Tube furnace set to 450
8/26/2010	3:33:09 PM	BCl3 valve closed
8/26/2010	3:33:09 PM	PH3 valve closed
8/26/2010	3:33:09 PM	SiCl4 pre valve closed
8/26/2010	3:33:09 PM	SiCl4 post valve closed
8/26/2010	3:33:09 PM	Main Vac valve closed
8/26/2010	3:33:09 PM	Bypass valve closed
8/26/2010	3:33:09 PM	Helium valve opened
8/26/2010	3:33:09 PM	H2 valve opened
8/26/2010	3:33:09 PM	Bubbler valve opened
8/26/2010	3:33:09 PM	Helium MFC set to  500.000000
8/26/2010	3:33:09 PM	H2 MFC set to  15.000000
8/26/2010	3:33:09 PM	BCl3 MFC set to  0.000000
8/26/2010	3:33:09 PM	PHl3 MFC set to  0.000000
8/26/2010	3:33:09 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:33:09 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:33:09 PM	Tube furnace set to 450
8/26/2010	3:38:09 PM	H2 valve closed
8/26/2010	3:38:09 PM	BCl3 valve closed
8/26/2010	3:38:09 PM	PH3 valve closed
8/26/2010	3:38:09 PM	SiCl4 pre valve closed
8/26/2010	3:38:09 PM	SiCl4 post valve closed
8/26/2010	3:38:09 PM	Main Vac valve closed
8/26/2010	3:38:09 PM	Bypass valve closed
8/26/2010	3:38:09 PM	Helium valve opened
8/26/2010	3:38:09 PM	Bubbler valve opened
8/26/2010	3:38:09 PM	Helium MFC set to  500.000000
8/26/2010	3:38:09 PM	H2 MFC set to  0.000000
8/26/2010	3:38:09 PM	BCl3 MFC set to  0.000000
8/26/2010	3:38:09 PM	PHl3 MFC set to  0.000000
8/26/2010	3:38:09 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:38:09 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:38:09 PM	Tube furnace set to 0
8/26/2010	3:44:21 PM	Helium valve closed
8/26/2010	3:44:21 PM	H2 valve closed
8/26/2010	3:44:21 PM	BCl3 valve closed
8/26/2010	3:44:21 PM	PH3 valve closed
8/26/2010	3:44:21 PM	SiCl4 pre valve closed
8/26/2010	3:44:21 PM	SiCl4 post valve closed
8/26/2010	3:44:21 PM	Main Vac valve closed
8/26/2010	3:44:21 PM	Bypass valve closed
8/26/2010	3:44:21 PM	Bubbler valve closed
8/26/2010	3:44:21 PM	Helium MFC set to  0.000000
8/26/2010	3:44:21 PM	H2 MFC set to  0.000000
8/26/2010	3:44:21 PM	BCl3 MFC set to  0.000000
8/26/2010	3:44:21 PM	PHl3 MFC set to  0.000000
8/26/2010	3:44:21 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:44:21 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:44:21 PM	Tube furnace set to 0
8/26/2010	3:44:21 PM	Run finished at 3:44 PM
8/26/2010	3:44:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	3:44:25 PM	Recipe started at 3:44 PM
8/26/2010	3:44:25 PM	H2 valve closed
8/26/2010	3:44:25 PM	BCl3 valve closed
8/26/2010	3:44:25 PM	PH3 valve closed
8/26/2010	3:44:25 PM	SiCl4 pre valve closed
8/26/2010	3:44:25 PM	SiCl4 post valve closed
8/26/2010	3:44:25 PM	Main Vac valve closed
8/26/2010	3:44:25 PM	Bypass valve closed
8/26/2010	3:44:25 PM	Bubbler valve closed
8/26/2010	3:44:25 PM	Helium valve opened
8/26/2010	3:44:25 PM	Helium MFC set to  500.000000
8/26/2010	3:44:25 PM	H2 MFC set to  0.000000
8/26/2010	3:44:25 PM	BCl3 MFC set to  0.000000
8/26/2010	3:44:25 PM	PHl3 MFC set to  0.000000
8/26/2010	3:44:25 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:44:25 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:44:26 PM	Tube furnace set to 0
8/26/2010	3:44:26 PM	Helium valve closed
8/26/2010	3:44:26 PM	H2 valve closed
8/26/2010	3:44:26 PM	BCl3 valve closed
8/26/2010	3:44:26 PM	PH3 valve closed
8/26/2010	3:44:26 PM	SiCl4 pre valve closed
8/26/2010	3:44:26 PM	SiCl4 post valve closed
8/26/2010	3:44:26 PM	Main Vac valve closed
8/26/2010	3:44:26 PM	Bypass valve closed
8/26/2010	3:44:26 PM	Bubbler valve closed
8/26/2010	3:44:26 PM	Helium MFC set to  0.000000
8/26/2010	3:44:26 PM	H2 MFC set to  0.000000
8/26/2010	3:44:26 PM	BCl3 MFC set to  0.000000
8/26/2010	3:44:26 PM	PHl3 MFC set to  0.000000
8/26/2010	3:44:26 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:44:26 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:44:26 PM	Tube furnace set to 0
8/26/2010	3:44:26 PM	Run finished at 3:44 PM
8/26/2010	3:44:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	3:44:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	3:44:48 PM	Recipe started at 3:44 PM
8/26/2010	3:44:48 PM	Helium valve closed
8/26/2010	3:44:48 PM	H2 valve closed
8/26/2010	3:44:48 PM	BCl3 valve closed
8/26/2010	3:44:48 PM	PH3 valve closed
8/26/2010	3:44:48 PM	SiCl4 pre valve closed
8/26/2010	3:44:48 PM	SiCl4 post valve closed
8/26/2010	3:44:48 PM	Main Vac valve closed
8/26/2010	3:44:48 PM	Bubbler valve closed
8/26/2010	3:44:48 PM	Bypass valve opened
8/26/2010	3:44:48 PM	Helium MFC set to  0.000000
8/26/2010	3:44:48 PM	H2 MFC set to  0.000000
8/26/2010	3:44:48 PM	BCl3 MFC set to  0.000000
8/26/2010	3:44:48 PM	PHl3 MFC set to  0.000000
8/26/2010	3:44:48 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:44:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:44:48 PM	Tube furnace set to 0
8/26/2010	3:45:17 PM	Helium valve closed
8/26/2010	3:45:17 PM	H2 valve closed
8/26/2010	3:45:17 PM	BCl3 valve closed
8/26/2010	3:45:17 PM	PH3 valve closed
8/26/2010	3:45:17 PM	SiCl4 pre valve closed
8/26/2010	3:45:17 PM	SiCl4 post valve closed
8/26/2010	3:45:17 PM	Bubbler valve closed
8/26/2010	3:45:17 PM	Main Vac valve opened
8/26/2010	3:45:17 PM	Bypass valve opened
8/26/2010	3:45:17 PM	Helium MFC set to  0.000000
8/26/2010	3:45:17 PM	H2 MFC set to  0.000000
8/26/2010	3:45:17 PM	BCl3 MFC set to  0.000000
8/26/2010	3:45:17 PM	PHl3 MFC set to  0.000000
8/26/2010	3:45:17 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:45:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:45:18 PM	Tube furnace set to 0
8/26/2010	3:45:18 PM	Run finished at 3:45 PM
8/26/2010	3:45:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	3:45:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	3:45:26 PM	Recipe started at 3:45 PM
8/26/2010	3:45:26 PM	H2 valve closed
8/26/2010	3:45:26 PM	BCl3 valve closed
8/26/2010	3:45:26 PM	PH3 valve closed
8/26/2010	3:45:26 PM	SiCl4 pre valve closed
8/26/2010	3:45:26 PM	SiCl4 post valve closed
8/26/2010	3:45:26 PM	Main Vac valve closed
8/26/2010	3:45:26 PM	Bypass valve closed
8/26/2010	3:45:26 PM	Bubbler valve closed
8/26/2010	3:45:26 PM	Helium valve opened
8/26/2010	3:45:26 PM	Helium MFC set to  500.000000
8/26/2010	3:45:26 PM	H2 MFC set to  0.000000
8/26/2010	3:45:26 PM	BCl3 MFC set to  0.000000
8/26/2010	3:45:26 PM	PHl3 MFC set to  0.000000
8/26/2010	3:45:26 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:45:26 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:45:27 PM	Tube furnace set to 0
8/26/2010	3:46:41 PM	Helium valve closed
8/26/2010	3:46:41 PM	H2 valve closed
8/26/2010	3:46:41 PM	BCl3 valve closed
8/26/2010	3:46:41 PM	PH3 valve closed
8/26/2010	3:46:41 PM	SiCl4 pre valve closed
8/26/2010	3:46:41 PM	SiCl4 post valve closed
8/26/2010	3:46:41 PM	Main Vac valve closed
8/26/2010	3:46:41 PM	Bypass valve closed
8/26/2010	3:46:41 PM	Bubbler valve closed
8/26/2010	3:46:41 PM	Helium MFC set to  0.000000
8/26/2010	3:46:41 PM	H2 MFC set to  0.000000
8/26/2010	3:46:41 PM	BCl3 MFC set to  0.000000
8/26/2010	3:46:41 PM	PHl3 MFC set to  0.000000
8/26/2010	3:46:41 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:46:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:46:42 PM	Tube furnace set to 0
8/26/2010	3:46:42 PM	Run finished at 3:46 PM
8/26/2010	3:46:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	3:51:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	3:51:30 PM	Recipe started at 3:51 PM
8/26/2010	3:51:30 PM	Helium valve closed
8/26/2010	3:51:30 PM	H2 valve closed
8/26/2010	3:51:30 PM	BCl3 valve closed
8/26/2010	3:51:30 PM	PH3 valve closed
8/26/2010	3:51:30 PM	SiCl4 pre valve closed
8/26/2010	3:51:30 PM	SiCl4 post valve closed
8/26/2010	3:51:30 PM	Main Vac valve closed
8/26/2010	3:51:30 PM	Bubbler valve closed
8/26/2010	3:51:30 PM	Bypass valve opened
8/26/2010	3:51:30 PM	Helium MFC set to  0.000000
8/26/2010	3:51:30 PM	H2 MFC set to  0.000000
8/26/2010	3:51:30 PM	BCl3 MFC set to  0.000000
8/26/2010	3:51:30 PM	PHl3 MFC set to  0.000000
8/26/2010	3:51:30 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:51:30 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:51:30 PM	Tube furnace set to 0
8/26/2010	3:52:09 PM	Helium valve closed
8/26/2010	3:52:09 PM	H2 valve closed
8/26/2010	3:52:10 PM	BCl3 valve closed
8/26/2010	3:52:10 PM	PH3 valve closed
8/26/2010	3:52:10 PM	SiCl4 pre valve closed
8/26/2010	3:52:10 PM	SiCl4 post valve closed
8/26/2010	3:52:10 PM	Bubbler valve closed
8/26/2010	3:52:10 PM	Main Vac valve opened
8/26/2010	3:52:10 PM	Bypass valve opened
8/26/2010	3:52:10 PM	Helium MFC set to  0.000000
8/26/2010	3:52:10 PM	H2 MFC set to  0.000000
8/26/2010	3:52:10 PM	BCl3 MFC set to  0.000000
8/26/2010	3:52:10 PM	PHl3 MFC set to  0.000000
8/26/2010	3:52:10 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:52:10 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:52:10 PM	Tube furnace set to 0
8/26/2010	3:52:10 PM	Run finished at 3:52 PM
8/26/2010	3:52:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	3:52:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/26/2010	3:52:25 PM	Recipe started at 3:52 PM
8/26/2010	3:52:25 PM	H2 valve closed
8/26/2010	3:52:25 PM	BCl3 valve closed
8/26/2010	3:52:25 PM	PH3 valve closed
8/26/2010	3:52:25 PM	SiCl4 pre valve closed
8/26/2010	3:52:25 PM	SiCl4 post valve closed
8/26/2010	3:52:25 PM	Main Vac valve closed
8/26/2010	3:52:25 PM	Bypass valve closed
8/26/2010	3:52:25 PM	Bubbler valve closed
8/26/2010	3:52:25 PM	Helium valve opened
8/26/2010	3:52:25 PM	Helium MFC set to  500.000000
8/26/2010	3:52:25 PM	H2 MFC set to  0.000000
8/26/2010	3:52:25 PM	BCl3 MFC set to  0.000000
8/26/2010	3:52:25 PM	PHl3 MFC set to  0.000000
8/26/2010	3:52:25 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:52:25 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:52:25 PM	Tube furnace set to 0
8/26/2010	3:53:45 PM	Helium valve closed
8/26/2010	3:53:45 PM	H2 valve closed
8/26/2010	3:53:45 PM	BCl3 valve closed
8/26/2010	3:53:45 PM	PH3 valve closed
8/26/2010	3:53:45 PM	SiCl4 pre valve closed
8/26/2010	3:53:45 PM	SiCl4 post valve closed
8/26/2010	3:53:45 PM	Main Vac valve closed
8/26/2010	3:53:45 PM	Bypass valve closed
8/26/2010	3:53:45 PM	Bubbler valve closed
8/26/2010	3:53:45 PM	Helium MFC set to  0.000000
8/26/2010	3:53:45 PM	H2 MFC set to  0.000000
8/26/2010	3:53:45 PM	BCl3 MFC set to  0.000000
8/26/2010	3:53:45 PM	PHl3 MFC set to  0.000000
8/26/2010	3:53:45 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:53:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:53:45 PM	Tube furnace set to 0
8/26/2010	3:54:00 PM	Helium valve closed
8/26/2010	3:54:00 PM	H2 valve closed
8/26/2010	3:54:00 PM	BCl3 valve closed
8/26/2010	3:54:00 PM	PH3 valve closed
8/26/2010	3:54:00 PM	SiCl4 pre valve closed
8/26/2010	3:54:00 PM	SiCl4 post valve closed
8/26/2010	3:54:00 PM	Main Vac valve closed
8/26/2010	3:54:00 PM	Bubbler valve closed
8/26/2010	3:54:00 PM	Bypass valve opened
8/26/2010	3:54:00 PM	Helium MFC set to  0.000000
8/26/2010	3:54:00 PM	H2 MFC set to  0.000000
8/26/2010	3:54:00 PM	BCl3 MFC set to  0.000000
8/26/2010	3:54:00 PM	PHl3 MFC set to  0.000000
8/26/2010	3:54:00 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:54:00 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:54:00 PM	Tube furnace set to 0
8/26/2010	3:54:30 PM	Helium valve closed
8/26/2010	3:54:30 PM	H2 valve closed
8/26/2010	3:54:30 PM	BCl3 valve closed
8/26/2010	3:54:30 PM	PH3 valve closed
8/26/2010	3:54:30 PM	SiCl4 pre valve closed
8/26/2010	3:54:30 PM	SiCl4 post valve closed
8/26/2010	3:54:30 PM	Bubbler valve closed
8/26/2010	3:54:30 PM	Main Vac valve opened
8/26/2010	3:54:30 PM	Bypass valve opened
8/26/2010	3:54:30 PM	Helium MFC set to  0.000000
8/26/2010	3:54:30 PM	H2 MFC set to  0.000000
8/26/2010	3:54:30 PM	BCl3 MFC set to  0.000000
8/26/2010	3:54:30 PM	PHl3 MFC set to  0.000000
8/26/2010	3:54:30 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:54:30 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:54:30 PM	Tube furnace set to 0
8/26/2010	3:56:29 PM	H2 valve closed
8/26/2010	3:56:29 PM	BCl3 valve closed
8/26/2010	3:56:29 PM	PH3 valve closed
8/26/2010	3:56:29 PM	SiCl4 pre valve closed
8/26/2010	3:56:29 PM	SiCl4 post valve closed
8/26/2010	3:56:29 PM	Main Vac valve closed
8/26/2010	3:56:29 PM	Bypass valve closed
8/26/2010	3:56:29 PM	Bubbler valve closed
8/26/2010	3:56:29 PM	Helium valve opened
8/26/2010	3:56:29 PM	Helium MFC set to  500.000000
8/26/2010	3:56:29 PM	H2 MFC set to  0.000000
8/26/2010	3:56:29 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:29 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:29 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:29 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:29 PM	Tube furnace set to 0
8/26/2010	3:56:33 PM	Helium valve closed
8/26/2010	3:56:33 PM	H2 valve closed
8/26/2010	3:56:33 PM	BCl3 valve closed
8/26/2010	3:56:33 PM	PH3 valve closed
8/26/2010	3:56:33 PM	SiCl4 pre valve closed
8/26/2010	3:56:33 PM	SiCl4 post valve closed
8/26/2010	3:56:33 PM	Main Vac valve closed
8/26/2010	3:56:33 PM	Bypass valve closed
8/26/2010	3:56:33 PM	Bubbler valve closed
8/26/2010	3:56:33 PM	Helium MFC set to  0.000000
8/26/2010	3:56:33 PM	H2 MFC set to  0.000000
8/26/2010	3:56:33 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:33 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:33 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:33 PM	Tube furnace set to 0
8/26/2010	3:56:34 PM	Helium valve closed
8/26/2010	3:56:34 PM	H2 valve closed
8/26/2010	3:56:34 PM	BCl3 valve closed
8/26/2010	3:56:34 PM	PH3 valve closed
8/26/2010	3:56:34 PM	SiCl4 pre valve closed
8/26/2010	3:56:34 PM	SiCl4 post valve closed
8/26/2010	3:56:34 PM	Main Vac valve closed
8/26/2010	3:56:34 PM	Bubbler valve closed
8/26/2010	3:56:34 PM	Bypass valve opened
8/26/2010	3:56:34 PM	Helium MFC set to  0.000000
8/26/2010	3:56:34 PM	H2 MFC set to  0.000000
8/26/2010	3:56:34 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:34 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:34 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:34 PM	Tube furnace set to 0
8/26/2010	3:56:34 PM	Helium valve closed
8/26/2010	3:56:34 PM	H2 valve closed
8/26/2010	3:56:34 PM	BCl3 valve closed
8/26/2010	3:56:34 PM	PH3 valve closed
8/26/2010	3:56:34 PM	SiCl4 pre valve closed
8/26/2010	3:56:34 PM	SiCl4 post valve closed
8/26/2010	3:56:34 PM	Bubbler valve closed
8/26/2010	3:56:34 PM	Main Vac valve opened
8/26/2010	3:56:34 PM	Bypass valve opened
8/26/2010	3:56:34 PM	Helium MFC set to  0.000000
8/26/2010	3:56:34 PM	H2 MFC set to  0.000000
8/26/2010	3:56:34 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:34 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:34 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:34 PM	Tube furnace set to 0
8/26/2010	3:56:35 PM	H2 valve closed
8/26/2010	3:56:35 PM	BCl3 valve closed
8/26/2010	3:56:35 PM	PH3 valve closed
8/26/2010	3:56:35 PM	SiCl4 pre valve closed
8/26/2010	3:56:35 PM	SiCl4 post valve closed
8/26/2010	3:56:35 PM	Main Vac valve closed
8/26/2010	3:56:35 PM	Bypass valve closed
8/26/2010	3:56:35 PM	Bubbler valve closed
8/26/2010	3:56:35 PM	Helium valve opened
8/26/2010	3:56:35 PM	Helium MFC set to  500.000000
8/26/2010	3:56:35 PM	H2 MFC set to  0.000000
8/26/2010	3:56:35 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:35 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:35 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:35 PM	Tube furnace set to 0
8/26/2010	3:56:35 PM	Helium valve closed
8/26/2010	3:56:35 PM	H2 valve closed
8/26/2010	3:56:35 PM	BCl3 valve closed
8/26/2010	3:56:35 PM	PH3 valve closed
8/26/2010	3:56:35 PM	SiCl4 pre valve closed
8/26/2010	3:56:35 PM	SiCl4 post valve closed
8/26/2010	3:56:35 PM	Main Vac valve closed
8/26/2010	3:56:35 PM	Bypass valve closed
8/26/2010	3:56:35 PM	Bubbler valve closed
8/26/2010	3:56:35 PM	Helium MFC set to  0.000000
8/26/2010	3:56:35 PM	H2 MFC set to  0.000000
8/26/2010	3:56:35 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:35 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:35 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:35 PM	Tube furnace set to 0
8/26/2010	3:56:35 PM	Helium valve closed
8/26/2010	3:56:35 PM	H2 valve closed
8/26/2010	3:56:35 PM	BCl3 valve closed
8/26/2010	3:56:35 PM	PH3 valve closed
8/26/2010	3:56:35 PM	SiCl4 pre valve closed
8/26/2010	3:56:35 PM	SiCl4 post valve closed
8/26/2010	3:56:35 PM	Main Vac valve closed
8/26/2010	3:56:35 PM	Bubbler valve closed
8/26/2010	3:56:35 PM	Bypass valve opened
8/26/2010	3:56:35 PM	Helium MFC set to  0.000000
8/26/2010	3:56:35 PM	H2 MFC set to  0.000000
8/26/2010	3:56:35 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:35 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:35 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:36 PM	Tube furnace set to 0
8/26/2010	3:56:36 PM	Helium valve closed
8/26/2010	3:56:36 PM	H2 valve closed
8/26/2010	3:56:36 PM	BCl3 valve closed
8/26/2010	3:56:36 PM	PH3 valve closed
8/26/2010	3:56:36 PM	SiCl4 pre valve closed
8/26/2010	3:56:36 PM	SiCl4 post valve closed
8/26/2010	3:56:36 PM	Bubbler valve closed
8/26/2010	3:56:36 PM	Main Vac valve opened
8/26/2010	3:56:36 PM	Bypass valve opened
8/26/2010	3:56:36 PM	Helium MFC set to  0.000000
8/26/2010	3:56:36 PM	H2 MFC set to  0.000000
8/26/2010	3:56:36 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:36 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:36 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:36 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:36 PM	Tube furnace set to 0
8/26/2010	3:56:43 PM	Helium valve closed
8/26/2010	3:56:43 PM	H2 valve closed
8/26/2010	3:56:43 PM	BCl3 valve closed
8/26/2010	3:56:43 PM	PH3 valve closed
8/26/2010	3:56:43 PM	SiCl4 pre valve closed
8/26/2010	3:56:43 PM	SiCl4 post valve closed
8/26/2010	3:56:43 PM	Bubbler valve closed
8/26/2010	3:56:43 PM	Main Vac valve opened
8/26/2010	3:56:43 PM	Bypass valve opened
8/26/2010	3:56:43 PM	Helium MFC set to  0.000000
8/26/2010	3:56:43 PM	H2 MFC set to  0.000000
8/26/2010	3:56:43 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:43 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:43 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:43 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:43 PM	Tube furnace set to 0
8/26/2010	3:56:44 PM	Run finished at 3:56 PM
8/26/2010	3:56:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/26/2010	3:56:55 PM	Recipe started at 3:56 PM
8/26/2010	3:56:55 PM	BCl3 valve closed
8/26/2010	3:56:55 PM	PH3 valve closed
8/26/2010	3:56:55 PM	SiCl4 pre valve closed
8/26/2010	3:56:55 PM	SiCl4 post valve closed
8/26/2010	3:56:55 PM	Main Vac valve closed
8/26/2010	3:56:55 PM	Bypass valve closed
8/26/2010	3:56:55 PM	Bubbler valve closed
8/26/2010	3:56:55 PM	Helium valve opened
8/26/2010	3:56:55 PM	H2 valve opened
8/26/2010	3:56:55 PM	Helium MFC set to  500.000000
8/26/2010	3:56:55 PM	H2 MFC set to  15.000000
8/26/2010	3:56:55 PM	BCl3 MFC set to  0.000000
8/26/2010	3:56:55 PM	PHl3 MFC set to  0.000000
8/26/2010	3:56:55 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:56:55 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:56:55 PM	Tube furnace set to 0
8/26/2010	3:58:14 PM	BCl3 valve closed
8/26/2010	3:58:14 PM	PH3 valve closed
8/26/2010	3:58:14 PM	SiCl4 pre valve closed
8/26/2010	3:58:14 PM	SiCl4 post valve closed
8/26/2010	3:58:14 PM	Main Vac valve closed
8/26/2010	3:58:14 PM	Bypass valve closed
8/26/2010	3:58:14 PM	Helium valve opened
8/26/2010	3:58:14 PM	H2 valve opened
8/26/2010	3:58:14 PM	Bubbler valve opened
8/26/2010	3:58:14 PM	Helium MFC set to  500.000000
8/26/2010	3:58:14 PM	H2 MFC set to  15.000000
8/26/2010	3:58:14 PM	BCl3 MFC set to  0.000000
8/26/2010	3:58:14 PM	PHl3 MFC set to  0.000000
8/26/2010	3:58:14 PM	SiCl4 MFC set to  0.000000
8/26/2010	3:58:14 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	3:58:15 PM	Tube furnace set to 450
8/26/2010	4:04:15 PM	BCl3 valve closed
8/26/2010	4:04:15 PM	PH3 valve closed
8/26/2010	4:04:15 PM	SiCl4 pre valve closed
8/26/2010	4:04:15 PM	SiCl4 post valve closed
8/26/2010	4:04:15 PM	Main Vac valve closed
8/26/2010	4:04:15 PM	Bypass valve closed
8/26/2010	4:04:15 PM	Helium valve opened
8/26/2010	4:04:15 PM	H2 valve opened
8/26/2010	4:04:15 PM	Bubbler valve opened
8/26/2010	4:04:15 PM	Helium MFC set to  500.000000
8/26/2010	4:04:15 PM	H2 MFC set to  15.000000
8/26/2010	4:04:15 PM	BCl3 MFC set to  0.000000
8/26/2010	4:04:15 PM	PHl3 MFC set to  0.000000
8/26/2010	4:04:15 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:04:15 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:04:15 PM	Tube furnace set to 450
8/26/2010	4:09:15 PM	H2 valve closed
8/26/2010	4:09:15 PM	BCl3 valve closed
8/26/2010	4:09:15 PM	PH3 valve closed
8/26/2010	4:09:15 PM	SiCl4 pre valve closed
8/26/2010	4:09:15 PM	SiCl4 post valve closed
8/26/2010	4:09:15 PM	Main Vac valve closed
8/26/2010	4:09:15 PM	Bypass valve closed
8/26/2010	4:09:15 PM	Helium valve opened
8/26/2010	4:09:15 PM	Bubbler valve opened
8/26/2010	4:09:15 PM	Helium MFC set to  500.000000
8/26/2010	4:09:15 PM	H2 MFC set to  0.000000
8/26/2010	4:09:15 PM	BCl3 MFC set to  0.000000
8/26/2010	4:09:15 PM	PHl3 MFC set to  0.000000
8/26/2010	4:09:15 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:09:15 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:09:15 PM	Tube furnace set to 0
8/26/2010	4:14:48 PM	Helium valve closed
8/26/2010	4:14:48 PM	H2 valve closed
8/26/2010	4:14:48 PM	BCl3 valve closed
8/26/2010	4:14:48 PM	PH3 valve closed
8/26/2010	4:14:48 PM	SiCl4 pre valve closed
8/26/2010	4:14:48 PM	SiCl4 post valve closed
8/26/2010	4:14:48 PM	Main Vac valve closed
8/26/2010	4:14:48 PM	Bypass valve closed
8/26/2010	4:14:48 PM	Bubbler valve closed
8/26/2010	4:14:48 PM	Helium MFC set to  0.000000
8/26/2010	4:14:48 PM	H2 MFC set to  0.000000
8/26/2010	4:14:48 PM	BCl3 MFC set to  0.000000
8/26/2010	4:14:48 PM	PHl3 MFC set to  0.000000
8/26/2010	4:14:48 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:14:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:14:48 PM	Tube furnace set to 0
8/26/2010	4:14:48 PM	Run finished at 4:14 PM
8/26/2010	4:14:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	4:14:53 PM	Recipe started at 4:14 PM
8/26/2010	4:14:53 PM	Helium valve closed
8/26/2010	4:14:53 PM	H2 valve closed
8/26/2010	4:14:53 PM	BCl3 valve closed
8/26/2010	4:14:53 PM	PH3 valve closed
8/26/2010	4:14:53 PM	SiCl4 pre valve closed
8/26/2010	4:14:53 PM	SiCl4 post valve closed
8/26/2010	4:14:53 PM	Main Vac valve closed
8/26/2010	4:14:53 PM	Bubbler valve closed
8/26/2010	4:14:53 PM	Bypass valve opened
8/26/2010	4:14:53 PM	Helium MFC set to  0.000000
8/26/2010	4:14:53 PM	H2 MFC set to  0.000000
8/26/2010	4:14:53 PM	BCl3 MFC set to  0.000000
8/26/2010	4:14:53 PM	PHl3 MFC set to  0.000000
8/26/2010	4:14:53 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:14:53 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:14:53 PM	Tube furnace set to 0
8/26/2010	4:15:21 PM	Helium valve closed
8/26/2010	4:15:21 PM	H2 valve closed
8/26/2010	4:15:21 PM	BCl3 valve closed
8/26/2010	4:15:21 PM	PH3 valve closed
8/26/2010	4:15:21 PM	SiCl4 pre valve closed
8/26/2010	4:15:21 PM	SiCl4 post valve closed
8/26/2010	4:15:21 PM	Bubbler valve closed
8/26/2010	4:15:21 PM	Main Vac valve opened
8/26/2010	4:15:21 PM	Bypass valve opened
8/26/2010	4:15:21 PM	Helium MFC set to  0.000000
8/26/2010	4:15:21 PM	H2 MFC set to  0.000000
8/26/2010	4:15:21 PM	BCl3 MFC set to  0.000000
8/26/2010	4:15:21 PM	PHl3 MFC set to  0.000000
8/26/2010	4:15:21 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:15:21 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:15:21 PM	Tube furnace set to 0
8/26/2010	4:15:21 PM	Run finished at 4:15 PM
8/26/2010	4:15:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	4:15:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	4:15:54 PM	Recipe started at 4:15 PM
8/26/2010	4:15:54 PM	H2 valve closed
8/26/2010	4:15:54 PM	BCl3 valve closed
8/26/2010	4:15:54 PM	PH3 valve closed
8/26/2010	4:15:54 PM	SiCl4 pre valve closed
8/26/2010	4:15:54 PM	SiCl4 post valve closed
8/26/2010	4:15:54 PM	Main Vac valve closed
8/26/2010	4:15:54 PM	Bypass valve closed
8/26/2010	4:15:54 PM	Bubbler valve closed
8/26/2010	4:15:54 PM	Helium valve opened
8/26/2010	4:15:54 PM	Helium MFC set to  500.000000
8/26/2010	4:15:54 PM	H2 MFC set to  0.000000
8/26/2010	4:15:54 PM	BCl3 MFC set to  0.000000
8/26/2010	4:15:54 PM	PHl3 MFC set to  0.000000
8/26/2010	4:15:54 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:15:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:15:54 PM	Tube furnace set to 0
8/26/2010	4:17:10 PM	Helium valve closed
8/26/2010	4:17:10 PM	H2 valve closed
8/26/2010	4:17:10 PM	BCl3 valve closed
8/26/2010	4:17:10 PM	PH3 valve closed
8/26/2010	4:17:10 PM	SiCl4 pre valve closed
8/26/2010	4:17:10 PM	SiCl4 post valve closed
8/26/2010	4:17:10 PM	Main Vac valve closed
8/26/2010	4:17:10 PM	Bypass valve closed
8/26/2010	4:17:10 PM	Bubbler valve closed
8/26/2010	4:17:10 PM	Helium MFC set to  0.000000
8/26/2010	4:17:10 PM	H2 MFC set to  0.000000
8/26/2010	4:17:10 PM	BCl3 MFC set to  0.000000
8/26/2010	4:17:10 PM	PHl3 MFC set to  0.000000
8/26/2010	4:17:10 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:17:10 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:17:10 PM	Tube furnace set to 0
8/26/2010	4:17:10 PM	Run finished at 4:17 PM
8/26/2010	4:17:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2010	4:21:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2010	4:21:17 PM	Recipe started at 4:21 PM
8/26/2010	4:21:17 PM	Helium valve closed
8/26/2010	4:21:17 PM	H2 valve closed
8/26/2010	4:21:17 PM	BCl3 valve closed
8/26/2010	4:21:17 PM	PH3 valve closed
8/26/2010	4:21:17 PM	SiCl4 pre valve closed
8/26/2010	4:21:17 PM	SiCl4 post valve closed
8/26/2010	4:21:17 PM	Main Vac valve closed
8/26/2010	4:21:17 PM	Bubbler valve closed
8/26/2010	4:21:17 PM	Bypass valve opened
8/26/2010	4:21:17 PM	Helium MFC set to  0.000000
8/26/2010	4:21:17 PM	H2 MFC set to  0.000000
8/26/2010	4:21:17 PM	BCl3 MFC set to  0.000000
8/26/2010	4:21:17 PM	PHl3 MFC set to  0.000000
8/26/2010	4:21:17 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:21:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:21:17 PM	Tube furnace set to 0
8/26/2010	4:21:55 PM	Helium valve closed
8/26/2010	4:21:55 PM	H2 valve closed
8/26/2010	4:21:55 PM	BCl3 valve closed
8/26/2010	4:21:55 PM	PH3 valve closed
8/26/2010	4:21:55 PM	SiCl4 pre valve closed
8/26/2010	4:21:55 PM	SiCl4 post valve closed
8/26/2010	4:21:55 PM	Bubbler valve closed
8/26/2010	4:21:55 PM	Main Vac valve opened
8/26/2010	4:21:55 PM	Bypass valve opened
8/26/2010	4:21:55 PM	Helium MFC set to  0.000000
8/26/2010	4:21:55 PM	H2 MFC set to  0.000000
8/26/2010	4:21:55 PM	BCl3 MFC set to  0.000000
8/26/2010	4:21:55 PM	PHl3 MFC set to  0.000000
8/26/2010	4:21:55 PM	SiCl4 MFC set to  0.000000
8/26/2010	4:21:55 PM	Bypass solenoid MFC set to  0.000000
8/26/2010	4:21:55 PM	Tube furnace set to 0
8/26/2010	4:21:55 PM	Run finished at 4:21 PM
8/26/2010	4:21:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
